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Quartet Mechanics - Vacuum Aligner


Vacuum Aligner
Software driven for size change, wafer thickness: 150~1800µm, Drop-in Replace Brooks/PRI or Asyst

50-0260 3-axis vacuum grip aligner
150/200/300mm wafer
Wafer thickness 250~1280µm
Opaque or Transparent

50-0261 3-axis vacuum grip aligner
150/200/300mm wafer
Wafer thickness 150~1280µm & Taiko
Opaque or Transparent

50-0026 1-axis vacuum grip aligner (Delta Pick)
150/200/300mm wafer
Wafer thickness 250~1280µm
Opaque or Transparent

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